We review an on-chip approach for spontaneous Raman spectroscopy and SurfaceEnhanced Raman Spectroscopy (SERS) based on evanescent excitation of theanalyte as well as evanescent collection of the Raman signal usingComplementary Metal Oxide Semiconductor (CMOS) compatible single modewaveguides. The signal is either directly collected from the analyte moleculesor via plasmonic nanoantennas integrated on top of the waveguides. Flexibilityin the design of the geometry of the waveguide, and/or the geometry of theantennas, enables optimization of the collection efficiency. Furthermore thesensor can be integrated with additional functionality (sources, detectors,spectrometers) on the same chip. In this paper, the basic theoretical conceptsare introduced to identify the key design parameters and some proof-of-conceptexperimental results are reviewed.
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